Porvair TEM-515-6 (Inline Gas Filter) 25scfm/250psig, ePTFE/PP/V, 3nm, 3/8" MVCR

GasPro TEM-500

High Flow PTFE-316L in-Line Fliter

GasProTM TEM-500 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 2,123 l/min(75 scfm) are required. This all-welded assemply will deliver0.003 micron particle retention where a high flow rate is required and space is limited. A variety of fitting types is offered for easy installation.

A PTFE Membrane and Polypro supported Cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness.

Features and Benefits

• 3nm Filter Rating

  Our porous PTFE filters provide efficient particle retention efficiency 

  at > 0.003μm

  • High Flow

  GasProTM TEM-500 is rated to 708 l/min (25 scfm) 

  • PTFE Media / Polypropylene / Viton construction

  0.11 m2

   (1.2 ft2) PTFE filter media provides excellent flow and 

  chemical resistance.

  • Electro-polished 316L housing

  The filter assemblies have a 10Ra electro-polished 316L stainless 

  steel housing to prevent corrosion and particle formation.

  • Temperature and Pressure

  Operating temperature rating of 93.3°C (200°F) and operating 

  pressure rating of 17.2 bar (250 psig).

  • Cleanroom manufactured

  Our GasProTM TEM-500 filters are manufactured in a cleanroom to 

  insure particle free, chemically clean, and organic-free handling 

  and bagging to provide high out-of-package cleanliness. 

  Additional preconditioning is optional.

  • ISO 9001 quality system

  Manufacturing quality and consistency is maintained in a 

  cleanroom using ISO 9001 certified quality system. Each filter is 

  helium leak checked to greater than 1x10-9 atm cc/second.

  • 100% helium tested to greater than 1x10-9 atm cc/second.